JPS62103245U - - Google Patents
Info
- Publication number
- JPS62103245U JPS62103245U JP19418885U JP19418885U JPS62103245U JP S62103245 U JPS62103245 U JP S62103245U JP 19418885 U JP19418885 U JP 19418885U JP 19418885 U JP19418885 U JP 19418885U JP S62103245 U JPS62103245 U JP S62103245U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- stores
- substrate holder
- saturated melt
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19418885U JPS62103245U (en]) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19418885U JPS62103245U (en]) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103245U true JPS62103245U (en]) | 1987-07-01 |
Family
ID=31150926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19418885U Pending JPS62103245U (en]) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103245U (en]) |
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1985
- 1985-12-19 JP JP19418885U patent/JPS62103245U/ja active Pending